发言内容摘要
1. Problems Caused by Electrostatic Charge
a) Electrostatic Attraction.
b) Electrostatic Discharge.
c) EMI.
2. Charge Generation
a) Induction Charging
b) Tribocharging
3. ESD Measurements
a) Field Meter
b) Charge Plate Monitor
c) Resistance Meter
4. Continuous Monitoring of Charge.
5. What is AMC
6. Sources of AMC
7. Standards and Guidelines
8. How to Control AMC
9. Online AMC Monitoring
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1. Basic Definitions
a) What is contamination.
b) Effects of contamination.
c) Federal Standard 209E.
2. Personal Generated Contamination
a) Humans.
b) Cleanroom Garments.
c) Cleanroom Entry and Exit Practices.
3. Particle Counting
a) Particle Detection Basics
b) Different Type of Particle Counters.
c) Basic Particle Counter Performance Criteria
d) Identifying Particle Sources.
e) Applications for Particle Counters
4. Controlling Contamination
a) Consumables and Supplies
b) Finding Contamination Sources
c) Why Monitor
d) What to Monitor |
发言者简介
Peter Maguire is the Vice President of Asia Pacific Sales for Lighthouse Worldwide Solutions.
He has been involved in contamination monitoring and control for the past 10 years. His main areas of focus have been on particle counting, ESD monitoring and control and AMC monitoring and control.
He has given hundreds of lectures and trained thousands of engineers at companies such as Fujitsu, Hitachi, Maxtor, TSMC, Seagate, AU Optronics, ST Micro, SAE, SMIC, Hewlett Packard, Amkor, Texas instruments, Quanta Display and many others.
Using his experience in the cleanroom he has helped companies identify and solve contamination issues that where costing them hundreds of thousands of dollars in lost product.
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