发言内容摘要
本文主要介绍了洁净室里需要注意的几个测量点和它重要性,内容包括:室内的温度测量、湿度测量、送风量和排风量的测量、成品生产线上的微风速测量、洁净室内外压差测量等,以及与之配套的测试仪器选择方法。
Abstract: This article lists some notices of the measurement points and their importance in cleanrooms, content focus on:indoor temperature measurement, humidity survey, exhaust air flow measurement, production line velocity measurement, Inside and outside pure room differential pressure survey and the related test equipment for those measurement mentioned above. |