Abstract

Comprehensive AMC prevention, removal and monitoring concepts are an integral part in any total
contamination free environment for semiconductor manufacturing. This trend is expected to be
continuing in other related high tech industries like flat panel production in the near future.

About the author
Klaus Kuemmerle is joint Manager of M+W Zander’s Airborne Molecular Contamination Group in Singapore. He graduated with a degree in Physics from the University of Applied Sciences in Heilbronn, Germany.
Mr. Kuemmerle has 10 years of professional experience in airborne molecular contamination control in functions including product development, measurement technology, software development and consulting.